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FlashAnneal Furnace
Equipment designed specifically for high-temperature processing of semiconductors
- Rapid temperature rise
- Uniform temperature
- Compatibility with multiple processes
- Wafer adaptation
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Overview
Specifications
Introduction to FlashAnneal Furnace：
It is a device used for in-situ research on the charging and discharging processes of electrochemical systems such as lithium batteries under different temperature conditions. It achieves wide-range and precise temperature control (e.g., -100℃~100℃, etc.) through liquid nitrogen refrigeration and resistance heating, with a temperature stability of ±0.1℃. It supports reflection/transmission optical paths and various window materials, is compatible with analytical techniques such as XRD, Raman, and microscopy, and works with various types including button batteries and pouch batteries. It features quick assembly/disassembly and high sealing performance, enabling real-time observation of changes in the internal structure and electrochemical reactions of batteries, thus providing a reliable platform for research on battery performance and mechanisms.
