Small Beam Diameter Scanning Galvo Mirror Systems

· Optimize galvo scanner design to meet higher performance and big size mirror load
· Upgrade sensor and driver technology to run faster and more accurate
Common Specifications
Aperture size (mm)3, 5, 7
Active scan angle±12.5/±20°
Small step response time (ms)0.14
Max. RMS current (A/axis)2
Zero drift<10uRad./℃
Linearity99.90%
Repeat positioning accuracy<8uRad
Long-term drift (continuous operation for more than 8 hours)<0.5mRad
Weight (without cables)31g
Position input/output signal proportionality factor0.5V/°

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