VenusLab Sensing & Control Series

Smart Drive, Nano Perception

The VL-S/C series is the core component that endows precision machinery with "intelligence" and "vision". This series perfectly integrates high-bandwidth digital piezoelectric controllers with sub-nanometer non-contact sensors, constructing a complete closed-loop ecosystem ranging from microvolt-level voltage driving to picometer-level displacement detection. Whether it is high-speed dynamic scanning or long-term static holding, VL-S/C can ensure the system's precision remains consistent.

Applications

• Leveling of lithography machine workpiece stage and detection of wafer surface profile.
• AFM/STM probe scanning control and image reconstruction.
• Analysis of rotational error of air spindle and testing of hard disk head flying height.
• Providing real-time position monitoring for various types of piezoelectric nano-displacement stages.

VenusLab Sensing & Control (VL-S/C) Product Detailed Parameter Summary Table