VenusLab Piezo Multi-Axis Stages

Integrated Multi-Dimensional Nanopositioning Systems

High‑speed XY + 6‑axis parallel motion, zero cumulative error.
Monolithic structure, 15kg load at 50nm resolution.

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Data Sheet

Overview

Mastering Complex Motion in Nanometers

VenusLab Multi-Axis Stages provide a unified solution for complex spatial positioning tasks. Whether requiring large-travel 2D scanning or precise 6D alignment, our integrated systems combine high stiffness with ultrasonic piezo drives to ensure superior orthogonality and stability for the most demanding multi-degree-of-freedom applications.

Applications

Silicon Photonics Alignment
Wafer Metrology & Inspection
3D Laser Micro-machining
Space Component Simulation

Technical Specifications

Model Name	Travel Range (mm/°)	Drive Type	Max Load (kg)	Max Speed (mm/s)	Min Step (Resolution)	Repeatability	Sensor
VL-6D-2520	XY:±12.5, Z:±10, R:±5°	Piezo	1.0	20	100 nm	+/- 300 nm	Grating
VL-XYZ-2020-HD	20 * 20 * 20	Piezo	15	40	100 nm	+/- 300 nm	Grating
VL-XY-2020	20 * 20	Piezo	N/A	100	100 nm	+/- 300 nm	Grating
VL-XY-150150-HD	150 * 150	Piezo	10.0	50	50 nm	+/- 200 nm	Grating
VL-XY-105105	105 * 105	Piezo	2.0	100	50 nm	+/- 200 nm	Grating
VL-SYS-11075-Z05	110 * 75 * 5	Piezo	N/A	N/A	50 nm	+/- 200 nm	Grating
VL-XY-11075-IX	110 * 75	Piezo	1.0	100	50 nm	+/- 200 nm	Grating
VL-XY-11075	110 * 75	Piezo	1.0	100	50 nm	+/- 200 nm	Grating
VL-XY-7575	75 * 75	Piezo	3.0	100	50 nm	+/- 200 nm	Grating
VL-XY-7550	75 * 50	Piezo	1.0	20	100 nm	+/- 300 nm	Grating
VL-SYS-5050-Z12	XY:±25, Z:±6	Piezo	2	30	50 nm	+/- 200 nm	Grating
VL-SYS-5050-R100	XY:±25, R:±6°	Piezo	10	30	100 nm / 0.0005°	+/- 200 nm	Grating
VL-XY-5050	50 * 50	Piezo	5.0	100	50 nm	+/- 200 nm	Grating
VL-XY2-7550	75 * 50	Piezo	1.0	100	50 nm	+/- 200 nm	Grating
VL-SYS-2525-Z06	XY:±12.5, Z:±3	Piezo	0.5	30	50 nm	+/- 200 nm	Grating
VL-XY-5025	50 * 25	Piezo	1.0	100	50 nm	+/- 200 nm	Grating
VL-SYS-0505-XYZ	5 * 5 * 5	Piezo	0.3	30	100 nm	+/- 200 nm	Grating
VL-6D-5020-E	50x50x20, ±5°	Piezo	0.5	20	10-100 nm	+/- 100-300 nm	Grating