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Brightfield and Darkfield Long-Working-Distance Objective Lens

Part Number: VL Plan Fluor EPI BD 100X

Breakthrough in long working distance at high magnification: With a working distance of 3.1mm, it far exceeds that of conventional 100× objectives (usually < 1mm), balancing ultra-precise observation and operational safety; Ultimate resolution: NA 0.8 combined with flat-field semi-apochromatism enables detection of ultra-fine defects such as nanoscale short circuits in chips and pinholes in wafer oxide layers.


Applications include:
Nanoscale scratch detection of semiconductor chips (dark field), microtopography analysis of ultra-precision materials (such as graphene) (bright field), and high-magnification observation of abnormal metal grain boundaries.

Caution
  • Product image is for representative purposes only and not reflective of every product available on this page.

Configured Specifications

NA0.8WD3.1mm
R0.34um±D.F0.43um
Unit Price
Total
Ship Date
TBD
Qty.
Quantity Price(USD)Ship Date
1-10TBD
10-TBD
NOTE : Ship Dates above are subject to change depending upon availability.

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