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L Plan Fluor EPI BD Series Objectives

Part Number: VL L Plan Fluor EPI BD 100X

Breakthrough in long working distance at high magnification: With a working distance of 3.1mm, it far exceeds that of conventional 100× objectives (usually < 1mm), balancing ultra-precise observation and operational safety; Ultimate resolution: NA 0.8 combined with flat-field semi-apochromatism enables detection of ultra-fine defects such as nanoscale short circuits in chips and pinholes in wafer oxide layers.


Applications include:
Nanoscale scratch detection of semiconductor chips (dark field), microtopography analysis of ultra-precision materials (such as graphene) (bright field), and high-magnification observation of abnormal metal grain boundaries.

Images are for display purposes only.

Specifications

NAWDR±D.F
0.83.1mm0.34um0.43um
Unit Price
Total
Ship Date
TBD
Quantity Price(USD)Ship Date
1-10TBD
10-TBD
NOTE : Ship Dates above are subject to change depending upon availability.
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