VL Multi-Axis & Integrated Stages

Part Number: VL-XYZ60S-M

Advantages:Superior rigidity/thermal stability – stainless steel resists deformation (vs. aluminum) under heavy loads/temp shifts.

Differentiation:Engineered for drift-sensitive high-end applications; vacuum-compatible capable.

Applications:Vacuum chamber experiments, semiconductor wafer alignment, interferometer setup.

Images are for display purposes only.

Specifications

Axis Configuration	Travel Range	Load Capacity	Resolution
3 Axes (XYZ)	13 mm	10 kg (High Load)	0.01 mm

Unit Price

Total

Ship Date

TBD

Quantity	Price(USD)	Ship Date
1-10		TBD
10-		TBD

NOTE : Ship Dates above are subject to change depending upon availability.

	Model	Travel Range	Load Capacity	Axis Configuration	Resolution
	VL-5A-Int	13 mm / ±5°	3 kg	5 Axes (XYZ θₓθᵧθ_z)	0.01 mm / 5′		VL-XYZ60A-M	±6.5 mm	3 kgf (29.4N)	3 Axes (XYZ)	0.01 mm

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