Special Applications

It targets extreme scenarios such as ultra-high temperature, vacuum, and high pressure, meets special experimental needs, and breaks through the environmental limitations of conventional equipment.

Ultra-high temperature stage for Microscope

Ultra-high temperature resistance + long-term stable operation

  • Extreme high-temperature performance
  • Precise temperature control and stability
  • Seamless adaptation to microscopes
  • Compact, durable and safe
  • Wide range of scenario coverage

XRDThermo Stage

Equipment used with X-ray diffractometers (XRD)

  • Wide temperature range regulation
  • Precise and stable temperature control
  • In-situ testing function
  • Good radiation transmittance

SEMThermo Stage

A variable temperature sample stage installed in the sample chamber of a scanning electron microscope (SEM)

  • In-situ variable temperature observation
  • Wide temperature range
  • High-precision temperature control
  • Compatible with various analyses

FlashAnneal Furnace

Equipment designed specifically for high-temperature processing of semiconductors

  • Rapid temperature rise
  • Uniform temperature
  • Compatibility with multiple processes
  • Wafer adaptation
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