Suitable for VUV coating uniformity inspection (covering a typical area in a single scan to enable rapid evaluation of coating quality) and plasma transient radiation diagnostics (capturing millisecond-level VUV pulse signals);

The high-flux VUV radiation resistance characteristic of SiC ensures long service life, the 8-level gain covers the full-scenario range from "weak signal analysis" to "strong pulse quantification", and the vacuum flange supports high-vacuum chamber integration.