Compatible with large-area thin film deposition monitoring (wide-area coverage for efficient coating uniformity detection) and VUV plasma wide-area diagnostics (a single detector covers a larger spatial range, reducing the number of scans);

The SiC-based high stability and radiation resistance performance ensure long-term reliable operation, the adjustable gain enables seamless switching between "weak light signals" and "strong radiation pulses", and the vacuum flange is compatible with a high-vacuum environment (≤10⁻⁴Pa).