Plan Fluor EPI BD Series Objectives

Near-diffraction-limited resolution, with flat-field correction ensuring clarity across the entire 1mm field of view (FN25÷50), and accurate color reproduction of microstructures.

Applications include:
Metallographic structure analysis (distinction between martensite/austenite), localization of nanoscale defects in wafers (abnormal oxide layers), and thin-film pinhole detection (dark field).