CF Plan Series Objectives

Infinity correction, bright field achromatism; 20× medium-high magnification + NA=0.46, submicron resolution (0.60μm), working distance of 3.1mm, suitable for conventional samples.

Applications:
Bright field analysis of submicron-level structures, such as observation of shallow surface defects (micro-cracks, particles) in semiconductor chips and cellular substructures (distribution of organelles).