CF Plan Series Objectives

Infinity correction, bright field achromatic; 50× high magnification + NA=0.80, achieving a nanoscale resolution of 0.34μm, but with a short working distance and shallow depth of focus, requiring high sample flatness.

Applications:
Bright field observation of nanoscale fine structures, such as nanowires in semiconductor devices, microtopography of metal grain boundaries, or ultrastructural analysis of ultrathin sections.