VenusLab Nano & Motorized Series

Part Number: VL-Nano-X1000

Advantages:Combines piezo’s nm-resolution with motorized stage’s mm-stroke – frictionless, no backlash.

Differentiation:Fixes traditional piezo’s short-stroke issue; covers large ranges without complex macro-micro dual drive.

Applications:Large-range interferometry, precision optical alignment, semiconductor wafer inspection.

Images are for display purposes only.

Specifications

Axis Configuration	Travel Range	Max Speed	Resolution
1 Axis (X)	1 mm	Millisecond-Level Response	2 nm

Unit Price

Total

Ship Date

TBD

Quantity	Price(USD)	Ship Date
1-10		TBD
10-		TBD

NOTE : Ship Dates above are subject to change depending upon availability.

	Model	Travel Range	Axis Configuration	Resolution	Max Speed
	VL-Hex-90-S	±12mm / ±10°	6 Axes (6-DOF)	0.1 μm	10 mm/s		VL-IM-X17-20	20 mm	1 Axis (X)	1 nm	2 mm/s		VL-MS-XY100-Lin	100 × 100 mm	2 Axes (XY)	10 nm	500 mm/s

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