VenusLab Nano & Motorized Series

Product image of VL-Nano-XY15
Product image of VL-Nano-XY15

Full-Scenario Ultra-Precision Motion Control Solutions

  • Sub-nanometer piezo resolution + linear/inertial motor large stroke – no micro-macro barrier.
  • Fingernail-sized inertial to rigid 6-DOF hexapods – flexible spatial posture definition.

Overview

Nano Precision, Macro Reach

The VL-N/M series represents VenusLab's highest standard in the field of precision engineering. This series integrates cutting-edge technologies such as piezoelectric ceramics, stick-slip inertial drives, voice coil motors, and non-contact linear motors. Whether it is atomic-level microscopic imaging requiring 0.1nm steps, high-speed and high-throughput wafer scanning, or six-dimensional automatic coupling of complex optical paths, VL-N/M can provide turnkey solutions from core components to complete systems.


Applications

  • Nanoscale Z-axis focusing of the objective lens and XY fine scanning of the stage.
  • Automated alignment of fiber arrays and waveguides using a six-axis parallel mechanism.
  • High-speed linear motor scanning in wafer defect detection.
  • Piezoelectric tilting mirrors for atmospheric turbulence correction and rapid beam stabilization.

Mechanical Dimensions

Explore Series

ModelTravel RangeAxis ConfigurationResolutionMax Speed
VL-Nano-X10001 mm1 Axis (X)2 nmMillisecond-Level ResponseVL-Hex-90-S±12mm / ±10°6 Axes (6-DOF)0.1 μm10 mm/sVL-IM-X17-2020 mm1 Axis (X)1 nm2 mm/sVL-MS-XY100-Lin100 × 100 mm2 Axes (XY)10 nm500 mm/s
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