SiC-EUV-AG Photodetector

Compatible with EUV light source far-field distribution testing (wide-area coverage of low-illuminance signals) and large-area coating uniformity inspection (covering a larger area in a single scan); the vacuum flange supports high-vacuum chamber integration, and the adjustable gain enables seamless switching between "wide-area low light" and "local strong light", breaking through the dynamic range bottleneck of traditional detectors.