VL PZT Linear Motor

Part Number: VL-PZT-L-90-T

Advantages: Full closed-loop scanning; high-precision linear encoder real-time feedback, no cumulative error in large-range movement.

Differentiation: Resolves the speed-nano-precision trade-off of conventional long-stroke stages.

Applications: Large-aperture interferometer scanning, full-wafer inspection.

Images are for display purposes only.

Specifications

Travel Range	Resolution	Max Load
90 mm	20 nm	3.0 kg

Unit Price

Total

Ship Date

TBD

Quantity	Price(USD)	Ship Date
1-10		TBD
10-		TBD

NOTE : Ship Dates above are subject to change depending upon availability.

	Model	Max Load	Travel Range	Resolution
	VL-PZT-L-18-S	1.0 kg	18 mm	10 nm		VL-PZT-XY-250	10.0 kg	250 × 250 mm	50 nm		VL-PZT-L-200	5.0 kg	200 mm	50 nm

Join Venus Lab Inner Lens for exclusive science and product updates.

Join our mailing list today:

When you sign up for our insider updates, we’ll handle your personal information with care and in accordance with our privacy policy.

Tel: +65 8099 5547

Wechat: +65 8099 5547

Postal Code: 119276

Address: 15 KENT RIDGE CRESCENT

Company Info

Products

Help Center