VL PZT Linear Motor

Cross-scale precision positioning platform

Cross-Scale Motion: Beyond piezo micron stroke; 18–90mm cm-scale travel with 10nm ultra-high resolution.
Zero-Drift Locking: Piezo friction drive, power-off self-locking, no thermal drift or jitter.

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Data Sheet

Overview

Nanometer Precision, Millimeter Range

The Venus Nano™ piezoelectric motor series redefines precision movement. It abandons the complex structure of traditional motor + lead screw and adopts direct-drive piezoelectric motor technology, achieving a perfect integration of large stroke and nanoscale stepping in an extremely compact volume. With features such as power-off self-locking, low heat generation, and no magnetic interference, it is an ideal choice for precision optical adjustment, semiconductor inspection, and micro-nano processing fields.

Applications

Semiconductor: Wafer surface topography inspection and defect scanning.
Microscopy: Long-distance searching and fine focusing of microscope samples.
Photonics: Optical path delay line adjustment and fiber coupling.
Metrology: Precision interferometry and profile analysis.

Mechanical Dimensions

Venus Nano™ Piezo Motor Stages List

Original Ref.	Product Name	Axis	Travel	Est. Res.	Feature/Note
XY Scanning
VL-PZT-XY-250	Venus Nano™ XY Scanning Stage	XY	250 × 250 mm	50 nm	Large Area Scanning, High Speed
Linear Series
VL-PZT-L-10	Venus Nano™ Linear Stage	X	10 mm	10 nm	Miniature Size
VL-PZT-L-25	Venus Nano™ Linear Stage	X	25 mm	10 nm	Miniature Long Travel
VL-PZT-L-13-S	Venus Nano™ Compact Stage	X	13 mm	10 nm	Compact Design
VL-PZT-L-18-S	Venus Nano™ Compact Stage	X	18 mm	10 nm	Hero Product, Self-Locking
VL-PZT-L-25-S	Venus Nano™ Compact Stage	X	25 mm	10 nm	Compact Long Travel
VL-PZT-L-10-H	Venus Nano™ High-Load Stage	X	10 mm	20 nm	Reinforced Load Capacity
VL-PZT-L-10-K	Venus Nano™ Kinematic Stage	X	10 mm	20 nm	Specialized Structure
VL-PZT-L-40-H	Venus Nano™ High-Load Stage	X	40 mm	20 nm	Reinforced, Mid-Range
VL-PZT-L-20-R	Venus Nano™ Rail Stage	X	20 mm	20 nm	Reinforced Rail Guide
VL-PZT-L-50	Venus Nano™ Standard Stage	X	50 mm	20 nm	Standard Mid-Travel
VL-PZT-L-90-T	Venus Nano™ Wide Stage	X	90 mm	20 nm	Hero Product, Wide Table
VL-PZT-L-80	Venus Nano™ Standard Stage	X	80 mm	20 nm	Long Travel
VL-PZT-L-150	Venus Nano™ Long Travel Stage	X	150 mm	50 nm	Extended Range
VL-PZT-L-200	Venus Nano™ Max Travel Stage	X	200 mm	50 nm	Ultra Long Travel
VL-PZT-L-200-HK	Venus Nano™ Heavy Duty Stage	X	200 mm	50 nm	High Load, Long Travel