VL PZT Linear Motor

Part Number: VL-PZT-XY-250

Advantages: Large field of view + nano-precision; piezo direct drive eliminates lead screw backlash for cross-scale precision scanning.

Differentiation: Rare compact solution balancing 8-inch wafer range and submicron positioning.

Applications: Semiconductor wafer defect inspection, full-scan of large biological sections, panel testing.

Images are for display purposes only.

Specifications

Travel Range	Resolution	Max Load
250 × 250 mm	50 nm	10.0 kg

Unit Price

Total

Ship Date

TBD

Quantity	Price(USD)	Ship Date
1-10		TBD
10-		TBD

NOTE : Ship Dates above are subject to change depending upon availability.

	Model	Max Load	Travel Range	Resolution
	VL-PZT-L-18-S	1.0 kg	18 mm	10 nm		VL-PZT-L-90-T	3.0 kg	90 mm	20 nm		VL-PZT-L-200	5.0 kg	200 mm	50 nm

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